Showing results 2 to 9 of 9
Issue Date | Title | Author(s) | Type |
---|---|---|---|
2009 | Design and fabrication of 2-DOF silicon micromirror with sloped electrodes | 박재형 | Conference Paper |
2009 | Design and fabrication of a self-aligned parallel-plate-type silicon micromirror minimizing the effect of misalignment | 박재형 | Article |
2007 | Drift-free single crystalline silicon micromirror with floating field limiting shields | 박재형 | Conference Paper |
2009 | Experimental and theoretical analysis of DEP-based particle deflection for the separation of protein-bound particles | 박재형 | Article |
2009 | High fill-factor micromirror array using a self-aligned vertical comb drive actuator with two rotational axes | 박일흥; 박재형 | Article |
2009 | MEMS micromirror characterization in space environments | 박일흥; 박재형 | Article |
2007 | Monolithic RF MEMS probe array system using RF MEMS SP3T switches for permittivity measurement | 박재형 | Conference Paper |
2009 | Reliability-based characterization of single crystalline silicon micromirrors for space applications | 박일흥; 박재형 | Conference Paper |