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Drift-free single crystalline silicon micromirror with floating field limiting shields

Title
Drift-free single crystalline silicon micromirror with floating field limiting shields
Authors
Yoo B.-W.Jang Y.-H.Yu K.Park J.-H.Kim Y.-K.
Ewha Authors
박재형
Issue Date
2007
Journal Title
2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Indexed
SCOPUS scopus
Abstract
This paper presents the charging mitigation method at single crystalline silicon micromirror by means of improving the geometry around electrodes. We have now determined that tilt angle drift and stiction are due to the charging effect, and that the effect can be enormously reduced by floating field limiting shields around the electrodes and dielectric geometry. While 0.5 degrees drift was measured at the 83% voltage of the pull-in voltage from the previous micromirror model, the micromirror considering drift-free design showed ±0.005 degrees drift at the same percentage voltage of it. At the 97.7 % of the pull-in voltage, stiction occurred after about 220 seconds from the previous micromirror model. On the other hand, newly designed micromirror did not show any pull-in effect even at above percentage of it. © 2007 IEEE.
DOI
10.1109/OMEMS.2007.4373850
ISBN
1424406412; 9781424406418
Appears in Collections:
자연과학대학 > 물리학전공 > Journal papers
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