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Design and fabrication of 2-DOF silicon micromirror with sloped electrodes
- Title
- Design and fabrication of 2-DOF silicon micromirror with sloped electrodes
- Authors
- Jin J.-Y.; Park J.-H.; Yoo B.-W.; Jang Y.-H.; Kim Y.-K.
- Ewha Authors
- 박재형
- Issue Date
- 2009
- Journal Title
- 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
- Citation
- 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, pp. 135 - 136
- Indexed
- SCOPUS
- Document Type
- Conference Paper
- Abstract
- We report on the design, fabrication and experiment of a 2-DOF silicon scanning micromirror. We propose sloped electrodes to increase a maximum scan angle with a simple fabrication process. A delayed electroplating technique is adopted to fabricate the sloped profile of the electrodes over the patterned seed layer. We fabricated the 2-DOF scanning mirror which has different type of electrodes beneath each axis and compared with parallel plate electrodes. Experiment results show sloped electrodes increase stable range up to 62.1% and decreases actuation voltage down to 65.4% from parallel plate electrodes. ©2009 IEEE.
- DOI
- 10.1109/OMEMS.2009.5338542
- ISBN
- 9781424423828
- Appears in Collections:
- 자연과학대학 > 물리학전공 > Journal papers
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