View : 34 Download: 0

Design and fabrication of 2-DOF silicon micromirror with sloped electrodes

Title
Design and fabrication of 2-DOF silicon micromirror with sloped electrodes
Authors
Jin J.-Y.Park J.-H.Yoo B.-W.Jang Y.-H.Kim Y.-K.
Ewha Authors
박재형
Issue Date
2009
Journal Title
2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Indexed
SCOPUS scopus
Abstract
We report on the design, fabrication and experiment of a 2-DOF silicon scanning micromirror. We propose sloped electrodes to increase a maximum scan angle with a simple fabrication process. A delayed electroplating technique is adopted to fabricate the sloped profile of the electrodes over the patterned seed layer. We fabricated the 2-DOF scanning mirror which has different type of electrodes beneath each axis and compared with parallel plate electrodes. Experiment results show sloped electrodes increase stable range up to 62.1% and decreases actuation voltage down to 65.4% from parallel plate electrodes. ©2009 IEEE.
DOI
10.1109/OMEMS.2009.5338542
ISBN
9781424423828
Appears in Collections:
자연과학대학 > 물리학전공 > Journal papers
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE