Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박재형 | - |
dc.date.accessioned | 2016-08-28T11:08:07Z | - |
dc.date.available | 2016-08-28T11:08:07Z | - |
dc.date.issued | 2009 | - |
dc.identifier.isbn | 9781424423828 | - |
dc.identifier.other | OAK-13328 | - |
dc.identifier.uri | https://dspace.ewha.ac.kr/handle/2015.oak/229338 | - |
dc.description.abstract | We report on the design, fabrication and experiment of a 2-DOF silicon scanning micromirror. We propose sloped electrodes to increase a maximum scan angle with a simple fabrication process. A delayed electroplating technique is adopted to fabricate the sloped profile of the electrodes over the patterned seed layer. We fabricated the 2-DOF scanning mirror which has different type of electrodes beneath each axis and compared with parallel plate electrodes. Experiment results show sloped electrodes increase stable range up to 62.1% and decreases actuation voltage down to 65.4% from parallel plate electrodes. ©2009 IEEE. | - |
dc.language | English | - |
dc.title | Design and fabrication of 2-DOF silicon micromirror with sloped electrodes | - |
dc.type | Conference Paper | - |
dc.relation.index | SCOPUS | - |
dc.relation.startpage | 135 | - |
dc.relation.lastpage | 136 | - |
dc.relation.journaltitle | 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 | - |
dc.identifier.doi | 10.1109/OMEMS.2009.5338542 | - |
dc.identifier.scopusid | 2-s2.0-71749105185 | - |
dc.author.google | Jin J.-Y. | - |
dc.author.google | Park J.-H. | - |
dc.author.google | Yoo B.-W. | - |
dc.author.google | Jang Y.-H. | - |
dc.author.google | Kim Y.-K. | - |
dc.date.modifydate | 20200911081002 | - |