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Reliability-based characterization of single crystalline silicon micromirrors for space applications

Title
Reliability-based characterization of single crystalline silicon micromirrors for space applications
Authors
Yoo B.-W.Park J.-H.Jin J.-Y.Park I.H.Kim Y.-K.
Ewha Authors
박일흥박재형
Issue Date
2009
Journal Title
2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Indexed
SCOPUS scopus
Abstract
We focus on reliability-based tests of one-axis single crystalline silicon micromirrors and performance in space environments. Reliability testing inhere shows how to deal with fabrication misalignment, charging effect, settling time reduction, shock and vibration in space, stiction in humidity, and reflectivity degradation related to outgassing. The micromirror in the international space station (ISS) actuated successfully under non-gravity condition as on earth. ©2009 IEEE.
DOI
10.1109/OMEMS.2009.5338593
ISBN
9781424423828
Appears in Collections:
자연과학대학 > 물리학전공 > Journal papers
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