DSpace at EWHA: Reliability-based characterization of single crystalline silicon micromirrors for space applications

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DC Field	Value	Language
dc.contributor.author	박일흥	-
dc.contributor.author	박재형	-
dc.date.accessioned	2016-08-28T11:08:07Z	-
dc.date.available	2016-08-28T11:08:07Z	-
dc.date.issued	2009	-
dc.identifier.isbn	9781424423828	-
dc.identifier.other	OAK-13329	-
dc.identifier.uri	https://dspace.ewha.ac.kr/handle/2015.oak/229339	-
dc.description.abstract	We focus on reliability-based tests of one-axis single crystalline silicon micromirrors and performance in space environments. Reliability testing inhere shows how to deal with fabrication misalignment, charging effect, settling time reduction, shock and vibration in space, stiction in humidity, and reflectivity degradation related to outgassing. The micromirror in the international space station (ISS) actuated successfully under non-gravity condition as on earth. ©2009 IEEE.	-
dc.language	English	-
dc.title	Reliability-based characterization of single crystalline silicon micromirrors for space applications	-
dc.type	Conference Paper	-
dc.relation.index	SCOPUS	-
dc.relation.startpage	65	-
dc.relation.lastpage	66	-
dc.relation.journaltitle	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009	-
dc.identifier.doi	10.1109/OMEMS.2009.5338593	-
dc.identifier.scopusid	2-s2.0-71749111374	-
dc.author.google	Yoo B.-W.	-
dc.author.google	Park J.-H.	-
dc.author.google	Jin J.-Y.	-
dc.author.google	Park I.H.	-
dc.author.google	Kim Y.-K.	-
dc.contributor.scopusid	박일흥(7403243322;57199842780)	-
dc.date.modifydate	20230616163100	-