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Monolithic RF MEMS probe array system using RF MEMS SP3T switches for permittivity measurement

Title
Monolithic RF MEMS probe array system using RF MEMS SP3T switches for permittivity measurement
Authors
Kim J.-M.Kim N.Park J.-H.Cheon C.Kwon Y.Kim Y.-K.
Ewha Authors
박재형
Issue Date
2007
Journal Title
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Indexed
SCOPUS scopus
Abstract
The monolithic RF MEMS probe array system for the application of permittivity measurement was firstly proposed and implemented. The proposed system consists of RF MEMS probe array and RF MEMS SP3T(single-pole triple-throw) switches. We succeeded to show the feasibility of the system for the permittivity measurement experimentally through the permittivity measurement of liquid as operating RF MEMS switches in turn. ©2007 IEEE.
DOI
10.1109/SENSOR.2007.4300217
ISBN
1424408423; 9781424408429
Appears in Collections:
자연과학대학 > 물리학전공 > Journal papers
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