DSpace at EWHA: Monolithic RF MEMS probe array system using RF MEMS SP3T switches for permittivity measurement

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DC Field	Value	Language
dc.contributor.author	박재형	-
dc.date.accessioned	2016-08-28T11:08:48Z	-
dc.date.available	2016-08-28T11:08:48Z	-
dc.date.issued	2007	-
dc.identifier.isbn	1424408423	-
dc.identifier.isbn	9781424408429	-
dc.identifier.other	OAK-13094	-
dc.identifier.uri	https://dspace.ewha.ac.kr/handle/2015.oak/229129	-
dc.description.abstract	The monolithic RF MEMS probe array system for the application of permittivity measurement was firstly proposed and implemented. The proposed system consists of RF MEMS probe array and RF MEMS SP3T(single-pole triple-throw) switches. We succeeded to show the feasibility of the system for the permittivity measurement experimentally through the permittivity measurement of liquid as operating RF MEMS switches in turn. ©2007 IEEE.	-
dc.language	English	-
dc.title	Monolithic RF MEMS probe array system using RF MEMS SP3T switches for permittivity measurement	-
dc.type	Conference Paper	-
dc.relation.index	SCOPUS	-
dc.relation.startpage	663	-
dc.relation.lastpage	666	-
dc.relation.journaltitle	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems	-
dc.identifier.doi	10.1109/SENSOR.2007.4300217	-
dc.identifier.scopusid	2-s2.0-50049121325	-
dc.author.google	Kim J.-M.	-
dc.author.google	Kim N.	-
dc.author.google	Park J.-H.	-
dc.author.google	Cheon C.	-
dc.author.google	Kwon Y.	-
dc.author.google	Kim Y.-K.	-
dc.date.modifydate	20200911081002	-