Showing results 1 to 7 of 7
Issue Date | Title | Author(s) | Type |
---|---|---|---|
2008 | A low-drift, open-loop controlled, single crystalline silicon micromirror with floating field-limiting shields | 박재형 | Article |
2009 | Design and fabrication of 2-DOF silicon micromirror with sloped electrodes | 박재형 | Conference Paper |
2009 | Design and fabrication of a self-aligned parallel-plate-type silicon micromirror minimizing the effect of misalignment | 박재형 | Article |
2007 | Drift-free single crystalline silicon micromirror with floating field limiting shields | 박재형 | Conference Paper |
2009 | High fill-factor micromirror array using a self-aligned vertical comb drive actuator with two rotational axes | 박일흥; 박재형 | Article |
2009 | MEMS micromirror characterization in space environments | 박일흥; 박재형 | Article |
2009 | Reliability-based characterization of single crystalline silicon micromirrors for space applications | 박일흥; 박재형 | Conference Paper |