View : 18 Download: 0

A low-drift, open-loop controlled, single crystalline silicon micromirror with floating field-limiting shields

Title
A low-drift, open-loop controlled, single crystalline silicon micromirror with floating field-limiting shields
Authors
Yoo B.-W.Park J.-H.Jang Y.-H.Kim Y.-K.
Ewha Authors
박재형
Issue Date
2008
Journal Title
Journal of Micromechanics and Microengineering
ISSN
0960-1317JCR Link
Citation
vol. 18, no. 3
Indexed
SCI; SCIE; SCOPUS WOS scopus
Abstract
This paper describes the design, fabrication and testing of a one-axis micromirror in order to suppress the electric charging problem related to its actuation. The electrostatically-actuated torsional micromirror is of the parallel-plate type. Since the dielectric around the electrodes below the mirror plates is highly exposed, we installed gold shields in the floating state around the electrodes, so as to cover the exposed dielectric surface. The gold shields played a leading role in limiting the electric field between the electrodes. This effect was characterized and the tilting angle stability was measured by observing the micromirror performance with and without the floating field-limiting shields. Drift measurements of these two types of micromirrors were made using a position-sensing detector (PSD). The micromirror with the field-limiting shields, namely micromirror type A, showed a tilting angle drift of 0.005° at 83% of the pull-in voltage, while a tilting angle drift of 0.5° was measured at the same percentage of the pull-in voltage for the micromirror without the field-limiting shields, namely micromirror type B. At 97.7% of the pull-in voltage, the pull-in phenomenon occurred after 220 s for micromirror type B due to the charging effect. On the other hand, micromirror type A showed no pull-in phenomena with elapsed time at a bias of 97.7% of the pull-in voltage due to the resolution of the charging effect. © 2008 IOP Publishing Ltd.
DOI
10.1088/0960-1317/18/3/035031
Appears in Collections:
자연과학대학 > 물리학전공 > Journal papers
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE