Showing results 1 to 4 of 4
Issue Date | Title | Author(s) | Type |
---|---|---|---|
2008 | A low-drift, open-loop controlled, single crystalline silicon micromirror with floating field-limiting shields | 박재형 | Article |
2009 | Design and fabrication of 2-DOF silicon micromirror with sloped electrodes | 박재형 | Conference Paper |
2009 | Design and fabrication of a self-aligned parallel-plate-type silicon micromirror minimizing the effect of misalignment | 박재형 | Article |
2007 | Drift-free single crystalline silicon micromirror with floating field limiting shields | 박재형 | Conference Paper |