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Single-Crystal PMN-PT-Laminated Piezoelectric Scanning Micromirror for Laser Beam Scanning Applications
- Title
- Single-Crystal PMN-PT-Laminated Piezoelectric Scanning Micromirror for Laser Beam Scanning Applications
- Authors
- Hwang, Jeong-Yeon; Yoon, Hyun; Lee, Sang-Goo; Park, Ha-Seong; Ji, Chang-Hyeon
- Ewha Authors
- 지창현
- SCOPUS Author ID
- 지창현
- Issue Date
- 2023
- Journal Title
- IEEE SENSORS JOURNAL
- ISSN
- 1530-437X
1558-1748
- Citation
- IEEE SENSORS JOURNAL vol. 23, no. 18, pp. 21084 - 21095
- Keywords
- Laser beam scanning (LBS); lead magnesium niobate-lead titanate (PMN-PT); light detection and ranging (LiDAR); MEMS micromirror; piezoelectric actuation
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Indexed
- SCIE; SCOPUS
- Document Type
- Article
- Abstract
- A new type of piezoelectric scanning micromirror using single-crystal lead magnesium niobate-lead titanate (PMN-PT) is presented in this article. The micromirror is designed for one-dimensional (1-D) scanning and has a large aperture with a 5-mm-diameter reflective surface. The micromirror has single-crystal PMN-PT plates directly laminated onto micromachined silicon cantilever structures, and two different device geometries with varying PMN-PT planar dimensions have been designed. Mechanical amplification structures are utilized to achieve a maximum optical scan angle of over 30 degrees at a low driving voltage. Finite element analysis (FEA) was used to optimize the micromirror design, which was then fabricated using deep reactive ion etching (DRIE) of a silicon-on-insulator (SOI) substrate and lamination of separately prepared PMN-PT plates. The driving characteristics of the fabricated devices were measured using out-of-phase actuation of the two piezoelectric cantilevers with forward and backward frequency sweeps at various input voltages. An optical scan angle of 31.38 degrees at 3.514 kHz with 4-V-pp input has been achieved with model A in an ambient environment. The scan angle sensing capability was tested using a single cantilever for actuation and the other for sensing, and a relatively linear relationship was observed between the optical scan angle and the sensor output voltage with a measured average sensitivity of 0.158 V-rms/degrees. The uniformity of the PMN-PT lamination process was verified by testing multiple samples. The maximum optical scan angle before device failure was also measured, which was 72 degrees at 34-V-pp input at 3.843 kHz.
- DOI
- 10.1109/JSEN.2023.3302310
- Appears in Collections:
- 공과대학 > 전자전기공학전공 > Journal papers
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