Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 지창현 | * |
dc.date.accessioned | 2023-10-19T16:31:16Z | - |
dc.date.available | 2023-10-19T16:31:16Z | - |
dc.date.issued | 2023 | * |
dc.identifier.issn | 1530-437X | * |
dc.identifier.issn | 1558-1748 | * |
dc.identifier.other | OAK-34128 | * |
dc.identifier.uri | https://dspace.ewha.ac.kr/handle/2015.oak/266287 | - |
dc.description.abstract | A new type of piezoelectric scanning micromirror using single-crystal lead magnesium niobate-lead titanate (PMN-PT) is presented in this article. The micromirror is designed for one-dimensional (1-D) scanning and has a large aperture with a 5-mm-diameter reflective surface. The micromirror has single-crystal PMN-PT plates directly laminated onto micromachined silicon cantilever structures, and two different device geometries with varying PMN-PT planar dimensions have been designed. Mechanical amplification structures are utilized to achieve a maximum optical scan angle of over 30 degrees at a low driving voltage. Finite element analysis (FEA) was used to optimize the micromirror design, which was then fabricated using deep reactive ion etching (DRIE) of a silicon-on-insulator (SOI) substrate and lamination of separately prepared PMN-PT plates. The driving characteristics of the fabricated devices were measured using out-of-phase actuation of the two piezoelectric cantilevers with forward and backward frequency sweeps at various input voltages. An optical scan angle of 31.38 degrees at 3.514 kHz with 4-V-pp input has been achieved with model A in an ambient environment. The scan angle sensing capability was tested using a single cantilever for actuation and the other for sensing, and a relatively linear relationship was observed between the optical scan angle and the sensor output voltage with a measured average sensitivity of 0.158 V-rms/degrees. The uniformity of the PMN-PT lamination process was verified by testing multiple samples. The maximum optical scan angle before device failure was also measured, which was 72 degrees at 34-V-pp input at 3.843 kHz. | * |
dc.language | English | * |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | * |
dc.subject | Laser beam scanning (LBS) | * |
dc.subject | lead magnesium niobate-lead titanate (PMN-PT) | * |
dc.subject | light detection and ranging (LiDAR) | * |
dc.subject | MEMS micromirror | * |
dc.subject | piezoelectric actuation | * |
dc.title | Single-Crystal PMN-PT-Laminated Piezoelectric Scanning Micromirror for Laser Beam Scanning Applications | * |
dc.type | Article | * |
dc.relation.issue | 18 | * |
dc.relation.volume | 23 | * |
dc.relation.index | SCIE | * |
dc.relation.index | SCOPUS | * |
dc.relation.startpage | 21084 | * |
dc.relation.lastpage | 21095 | * |
dc.relation.journaltitle | IEEE SENSORS JOURNAL | * |
dc.identifier.doi | 10.1109/JSEN.2023.3302310 | * |
dc.identifier.wosid | WOS:001090399700062 | * |
dc.identifier.scopusid | 2-s2.0-85167800627 | * |
dc.author.google | Hwang, Jeong-Yeon | * |
dc.author.google | Yoon, Hyun | * |
dc.author.google | Lee, Sang-Goo | * |
dc.author.google | Park, Ha-Seong | * |
dc.author.google | Ji, Chang-Hyeon | * |
dc.contributor.scopusid | 지창현(7202015390) | * |
dc.date.modifydate | 20240322125611 | * |