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A new method for determining the Subgap Density of States in n-/p-Type Low-Temperature polycrystalline-silicon thin-film transistors

Title
A new method for determining the Subgap Density of States in n-/p-Type Low-Temperature polycrystalline-silicon thin-film transistors
Authors
Lee I.Kim M.Shin M.-H.Shin H.
Ewha Authors
신형순
SCOPUS Author ID
신형순scopus
Issue Date
2017
Journal Title
Journal of Nanoscience and Nanotechnology
ISSN
1533-4880JCR Link
Citation
Journal of Nanoscience and Nanotechnology vol. 17, no. 5, pp. 2951 - 2958
Keywords
Density of StatesLow-Temperature Polycrystalline-Silicon Thin-Film Transistors
Publisher
American Scientific Publishers
Indexed
SCIE; SCOPUS WOS scopus
Document Type
Article
Abstract
A new method for determining the acceptor-/donor-like density of states (DOS) over the entire bandgap using both the measured multi-frequency capacitance-voltage characteristics and the differential ideality factor in n-/p-Type low-Temperature polycrystalline-silicon thin-film transistors (LTPS TFTs) is proposed and verified. The density of deep states as a function of the gate voltage (Vgs) is obtained using the differential ideality factor, which is calculated from the transfer curves. The density of tail states as a function of Vgs is obtained using the subgap DOS-induced capacitance (CLOC), which is calculated from the multi-frequency capacitance-voltage and resistance-voltage characteristics. The relationship between Vgs and energy, which is used to convert the DOS as a function of Vgs into the distribution of the DOS as a function of energy for device simulation, is defined using the frequency-independent gate capacitance (CG), composed of the gate oxide capacitance (COX), CLOC and the free-carrier charge induced capacitance (CFREE). The device simulation results using the acceptor-/donor-like DOS obtained by the new method for n-/p-Type LTPS TFTs exhibit excellent agreement with the measured data. © Copyright 2017 American Scientific Publishers All rights reserved.
DOI
10.1166/jnn.2017.14028
Appears in Collections:
엘텍공과대학 > 전자공학과 > Journal papers
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