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Electromagnetic biaxial microscanner with mechanical amplification at resonance

Title
Electromagnetic biaxial microscanner with mechanical amplification at resonance
Authors
Cho A.R.Han A.Ju S.Jeong H.Park J.-H.Kim I.Bu J.-U.Ji C.-H.
Ewha Authors
지창현
SCOPUS Author ID
지창현scopus
Issue Date
2015
Journal Title
Optics Express
ISSN
1094-4087JCR Link
Citation
vol. 23, no. 13, pp. 16792 - 16802
Publisher
OSA - The Optical Society
Indexed
SCI; SCIE; SCOPUS WOS scopus
Abstract
We present the design, fabrication, and measurement results of an electromagnetic biaxial microscanner with mechanical amplification mechanism. A gimbaled scanner with two distinct single-crystal silicon layer thicknesses and integrated copper coils has been fabricated with combination of surface and bulk micromachining processes. A magnet assembly consisting of an array of permanent magnets and a pole piece has been placed under the substrate to provide high strength lateral magnetic field oriented 45° to two perpendicular scanning axes. Micromirror has been supported by additional gimbal to implement a mechanical amplification. A 1.2mm-diameter mirror with aluminum reflective surface has been actuated at 60Hz for vertical scan and at 21kHz for horizontal scan. Maximum scan angle of 36.12° at 21.19kHz and 17.62° at 60Hz have been obtained for horizontal and vertical scans, respectively. © 2015 Optical Society of America.
DOI
10.1364/OE.23.016792
Appears in Collections:
엘텍공과대학 > 전자공학과 > Journal papers
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