Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 지창현 | * |
dc.date.accessioned | 2016-08-29T12:08:23Z | - |
dc.date.available | 2016-08-29T12:08:23Z | - |
dc.date.issued | 2015 | * |
dc.identifier.issn | 1094-4087 | * |
dc.identifier.other | OAK-15414 | * |
dc.identifier.uri | https://dspace.ewha.ac.kr/handle/2015.oak/230739 | - |
dc.description.abstract | We present the design, fabrication, and measurement results of an electromagnetic biaxial microscanner with mechanical amplification mechanism. A gimbaled scanner with two distinct single-crystal silicon layer thicknesses and integrated copper coils has been fabricated with combination of surface and bulk micromachining processes. A magnet assembly consisting of an array of permanent magnets and a pole piece has been placed under the substrate to provide high strength lateral magnetic field oriented 45° to two perpendicular scanning axes. Micromirror has been supported by additional gimbal to implement a mechanical amplification. A 1.2mm-diameter mirror with aluminum reflective surface has been actuated at 60Hz for vertical scan and at 21kHz for horizontal scan. Maximum scan angle of 36.12° at 21.19kHz and 17.62° at 60Hz have been obtained for horizontal and vertical scans, respectively. © 2015 Optical Society of America. | * |
dc.language | English | * |
dc.publisher | OSA - The Optical Society | * |
dc.title | Electromagnetic biaxial microscanner with mechanical amplification at resonance | * |
dc.type | Article | * |
dc.relation.issue | 13 | * |
dc.relation.volume | 23 | * |
dc.relation.index | SCI | * |
dc.relation.index | SCIE | * |
dc.relation.index | SCOPUS | * |
dc.relation.startpage | 16792 | * |
dc.relation.lastpage | 16802 | * |
dc.relation.journaltitle | Optics Express | * |
dc.identifier.doi | 10.1364/OE.23.016792 | * |
dc.identifier.wosid | WOS:000358543300031 | * |
dc.identifier.scopusid | 2-s2.0-84941308549 | * |
dc.author.google | Cho A.R. | * |
dc.author.google | Han A. | * |
dc.author.google | Ju S. | * |
dc.author.google | Jeong H. | * |
dc.author.google | Park J.-H. | * |
dc.author.google | Kim I. | * |
dc.author.google | Bu J.-U. | * |
dc.author.google | Ji C.-H. | * |
dc.contributor.scopusid | 지창현(7202015390) | * |
dc.date.modifydate | 20240322125611 | * |