2-D forward optical scanner with glass microlens and isolation blocks using thermal reflow

Abstract

We present a novel fabrication method of a two-dimensional forward optical scanner with integrated microlens. Glass microlens and electrical isolation blocks were integrated with silicon XY-stage using thermal reflow process. Measured scan angles in X and Y directions at resonance were ±4.9°and ±5.0°, respectively, at atmospheric pressure. © 2012 IEEE.