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dc.contributor.author지창현*
dc.date.accessioned2016-08-28T10:08:03Z-
dc.date.available2016-08-28T10:08:03Z-
dc.date.issued2013*
dc.identifier.issn0960-1317*
dc.identifier.otherOAK-10131*
dc.identifier.urihttps://dspace.ewha.ac.kr/handle/2015.oak/223767-
dc.description.abstractA monolithically integrated glass microlens optical scanner is presented. A new wafer-level fabrication approach addresses the issue of microlens integration and alignment in conventional microlens integrated devices. A through-silicon plano-convex glass microlens has been fabricated on a silicon substrate prior to the formation of an integrated microlens actuator, realized through two thermal reflow processes at 850 °C. A lateral comb drive is adapted to demonstrate the glass microlens scanner. The 800 m diameter microlens was laterally shifted up to ±51.6 m when an ac voltage of 28.5 V in amplitude was applied at a resonant frequency of 1.749 kHz at atmospheric pressure. The optical scanning angle of ±2.0° has been obtained with the fabricated device. © 2013 IOP Publishing Ltd.*
dc.languageEnglish*
dc.titleMonolithically integrated glass microlens scanner using a thermal reflow process*
dc.typeArticle*
dc.relation.issue6*
dc.relation.volume23*
dc.relation.indexSCI*
dc.relation.indexSCIE*
dc.relation.indexSCOPUS*
dc.relation.journaltitleJournal of Micromechanics and Microengineering*
dc.identifier.doi10.1088/0960-1317/23/6/065012*
dc.identifier.wosidWOS:000319451300012*
dc.identifier.scopusid2-s2.0-84878143837*
dc.author.googleYoo S.*
dc.author.googleHa J.-G.*
dc.author.googleJin J.-Y.*
dc.author.googleJi C.-H.*
dc.author.googleKim Y.-K.*
dc.contributor.scopusid지창현(7202015390)*
dc.date.modifydate20240322125611*
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공과대학 > 전자전기공학전공 > Journal papers
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