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Mie resonance-mediated antireflection effects of Si nanocone arrays fabricated on 8-in. wafers using a nanoimprint technique

Title
Mie resonance-mediated antireflection effects of Si nanocone arrays fabricated on 8-in. wafers using a nanoimprint technique
Authors
Kim, EunahCho, YunaePark, Kwang-TaeChoi, Jun-HyukLim, Seung-HyukCho, Yong-HoonNam, Yoon-HoLee, Jung-HoKim, Dong-Wook
Ewha Authors
김동욱
SCOPUS Author ID
김동욱scopus
Issue Date
2015
Journal Title
NANOSCALE RESEARCH LETTERS
ISSN
1556-276XJCR Link
Citation
NANOSCALE RESEARCH LETTERS vol. 10
Keywords
SiNanocone arrayAntireflectionMie resonanceNanoimprint
Publisher
SPRINGER
Indexed
SCIE; SCOPUS WOS
Document Type
Article
Abstract
We fabricated 8-in. Si nanocone (NC) arrays using a nanoimprint technique and investigated their optical characteristics. The NC arrays exhibited remarkable antireflection effects; the optical reflectance was less than 10% in the visible wavelength range. The photoluminescence intensity of the NC arrays was an order of magnitude larger than that of a planar wafer. Optical simulations and analyses suggested that the Mie resonance reduced effective refractive index, and multiple scattering in the NCs enabled the drastic decrease in reflection.
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DOI
10.1186/s11671-015-0865-8
Appears in Collections:
자연과학대학 > 물리학전공 > Journal papers
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