Core-insulator embedded nanosheet field-effect transistor for suppressing device-to-device variations

Abstract

Nanosheet field-effect transistors (NSFETs) have attracted considerable attention for their potential to achieve improved performance and energy efficiency compared to traditional FinFETs. Here, we present a comprehensive investigation of core-insulator-embedded nanosheet field-effect transistors (C-NSFETs), focusing on their improved performance and device-to-device (D2D) variability compared to conventional NSFETs through three-dimensional device simulations. The C-NSFETs exhibit enhanced direct-current (DC) performance, characterized by a steeper subthreshold slope and reduced off-current, indicating better gate electrostatic controllability. Furthermore, the structural design of C-NSFETs enables to demonstrate a notable resilience against D2D variations in nanosheet thickness and doping concentration. In addition, we investigate the effects of interface traps in C-NSFETs, emphasizing the importance of thermal oxidation processes in the formation of core-insulating layers to maintain optimal device performance. © The Author(s) 2024.