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공과대학
전자전기공학전공
Journal papers
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Low Power Electromagnetic Scanning Micromirror for LiDAR System
Title
Low Power Electromagnetic Scanning Micromirror for LiDAR System
Authors
Hwang J.-Y.
;
Bu J.-U.
;
Ji C.-H.
Ewha Authors
지창현
SCOPUS Author ID
지창현
Issue Date
2021
Journal Title
IEEE Sensors Journal
ISSN
1530-437X
Citation
IEEE Sensors Journal vol. 21, no. 6, pp. 7358 - 7366
Keywords
dynamic deformation
;
electromagnetic actuation
;
light detection and ranging (LiDAR) system
;
Scanning micromirror
Publisher
Institute of Electrical and Electronics Engineers Inc.
Indexed
SCIE; SCOPUS
Document Type
Article
Abstract
In this article, a low power and compact scanning micromirror for LiDAR (light detection and ranging) system is designed, fabricated, and characterized. A 5 mm-diameter scanning micromirror is electromagnetically actuated with multi-turn copper winding formed on the gimbal and magnet assembly formed under the silicon substrate. A unique magnetic circuit that generates an asymmetric radial magnetic field has been designed and analyzed. A series-connected double spring-mass system consisting of a gimbal and a mirror plate has been used to amplify the deflection angle. An analytic model of the system has been developed and verified with finite element analysis. Also, a reinforcement rim structure is utilized to reduce the dynamic deformation of the reflective surface down to 19.3 nmrms. An optical scan angle of 30° is obtained at 690 Hz, 17.4 mArms input, and corresponding power consumption is 7.8 mWrms. A prototype scanning system with 180° × 30° field-of-view has been demonstrated with fabricated scanning micromirror as the vertical scanner. The proposed approach provides a simple and compact design for a large diameter scanning micromirror, which can potentially be utilized in various LiDAR applications. © 2001-2012 IEEE.
DOI
10.1109/JSEN.2020.3048710
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