Electromagnetic 2D Scanning Micromirror for High Definition Laser Projection Displays

Abstract

We present the design, fabrication, and analysis of an electromagnetic biaxial scanning micromirror for a high definition laser pico-projection display system. The device consists of a microfabricated double gimbaled structure for mechanical amplification of horizontal scan angle and a set of uniquely designed permanent magnets for high magnetic field generation in a small volume. With the fabricated 1.2-mm-diameter micromirror, the maximum scan angle of 52 degrees at 28.9 kHz and 33 degrees at 60 Hz have been obtained for horizontal and vertical scans, respectively. The effective volume of the packaged micromirror measures 0.34 cm(3). A prototype full-color pico-projection display system has been fabricated with micromirror package and laser sources integrated into a 3.7 cm(3) volume.