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Effect of the chemical composition on the ablation characteristics of glass substrates in femtosecond laser machining

Title
Effect of the chemical composition on the ablation characteristics of glass substrates in femtosecond laser machining
Authors
Lee H.-M.Choi J.H.Moon S.-J.
Ewha Authors
최정현
SCOPUS Author ID
최정현scopus
Issue Date
2017
Journal Title
International Journal of Precision Engineering and Manufacturing
ISSN
2234-7593JCR Link
Citation
vol. 18, no. 11, pp. 1495 - 1499
Keywords
DrillingFemotosecond laserGlass
Publisher
SpringerOpen
Indexed
SCIE; SCOPUS; KCI WOS scopus
Abstract
In this work, we investigated the ablation characteristics of aluminosilicate, soda-lime, and borosilicate glass substrates in femtosecond laser processing. The laser wavelength was 1,552 nm with a pulse duration of 800 fs. The ablation threshold energy of each glass substrate was estimated using the D2 method. To determine the ablation threshold energy of each glass substrate, the weight percentages of various chemical components in the glass substrates were quantitatively analyzed by laser ablation inductively coupled plasma mass spectrometry. The ablation threshold energy of the glass substrates was found to depend on the Al2O3 and MgO contents. When the weight percentages of both components were higher, the ablation threshold energy was lower. The effect of these components on the ablation threshold energy was theoretically investigated using self-trapped exciton analysis. © 2017, Korean Society for Precision Engineering and Springer-Verlag GmbH Germany, part of Springer Nature.
DOI
10.1007/s12541-017-0177-2
Appears in Collections:
엘텍공과대학 > 환경공학전공 > Journal papers
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