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Advancing decal-transfer lithography with a reusable PDMS-coated nanoscale stamp

Title
Advancing decal-transfer lithography with a reusable PDMS-coated nanoscale stamp
Authors
Kim M.Youn S.K.
Ewha Authors
김연상
Issue Date
2007
Journal Title
Journal of the American Chemical Society
ISSN
0002-7863JCR Link
Citation
vol. 129, no. 37, pp. 11304 - 11305
Indexed
SCI; SCIE; SCOPUS WOS scopus
Abstract
We present nanoscale decal transfer lithography (DTL) in which the conventional poly(dimethylsiloxane) (PDMS) stamp is alternated with a reusable PDMS-coated nanoscale stamp. Owing to the PDMS thin layer coating strategy, we were able to promote the capability of conventional DTL. First, we succeeded in progressing toward a DTL process that extends to the nanometer scale. Second, we were able to empower the DTL stamp to be used several times. Copyright © 2007 American Chemical Society.
DOI
10.1021/ja072981m
Appears in Collections:
자연과학대학 > 화학·나노과학전공 > Journal papers
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