A study was conducted to develop a recovery-free photoinduced transformation technique of poly(dimethylsiloxane) (PDMS) to the robust inorganic silicon oxide alignment layer with a combination of an ultrathin PDMS coating technique. The study also demonstrated the development of the photoinduced transformation technique, using UVO treatment. It was demonstrated that transformation of PDMS layers to inorganic silicon oxide in this method allows for stability without recovery. It was observed that the silicon oxide alignment layers transformed through the technique,vertically align the liquid crystal (LC) molecules. It was also observed that the photoinduced transformation technique is comprised of an ultrathin PDMS layer coating and surface transformation with UVO.