NL repository
menu
검색
Library
Browse
Communities & Collections
By Date
Authors
Titles
Subject
My Repository
My Account
Receive email updates
Edit Profile
DSpace at EWHA
공과대학
전자전기공학전공
Journal papers
View : 698 Download: 0
Biaxial vector-graphic scanning micromirror using radial magnetic field
Title
Biaxial vector-graphic scanning micromirror using radial magnetic field
Authors
Han A.
;
Cho A.R.
;
Ju S.
;
Yoon B.
;
Lee S.
;
Kim T.
;
Bu J.-U.
;
Ji C.-H.
Ewha Authors
지창현
SCOPUS Author ID
지창현
Issue Date
2015
Journal Title
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Citation
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, pp. 843 - 846
Keywords
Electromagnetic actuation
;
Laser scanning
;
Radial magnetic field
;
Vector-graphic scanning micromirror
Publisher
Institute of Electrical and Electronics Engineers Inc.
Indexed
SCOPUS
Document Type
Conference Paper
Abstract
This paper presents the design, fabrication, and measurement results of an electromagnetic biaxial vector-graphic scanning micromirror. Instead of utilizing locally distributed magnetic fields from multiple magnets, radial magnetic field from concentric magnet assembly and unique coil geometry have been used to realize independent scan along two perpendicular axes irrespective of operation frequency. Proposed actuation mechanism also enables the use of a compact non-hermetic polymer-based package due to large driving torque and simple structure without any gap-closing microstructures. The magnet assembly is placed under the micromirror die with passive alignment and gap control during assembly process. Mechanical half scan angle of 11.6° and 3.8° have been achieved at DC current of 250mA and 400mA for horizontal and vertical scans, respectively. © 2015 IEEE.
DOI
10.1109/TRANSDUCERS.2015.7181055
ISBN
9781479989553
Appears in Collections:
공과대학
>
전자전기공학전공
>
Journal papers
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show full item record
Find@EWHA
트윗하기
BROWSE
Communities & Collections
By Date
Authors
Titles
Subject