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Position error inspection for mounting wafer in cleaning device using the radial shape board

Title
Position error inspection for mounting wafer in cleaning device using the radial shape board
Authors
Lee J.W.Lee B.-G.Lee J.-J.Yoon J.
Ewha Authors
윤정호
SCOPUS Author ID
윤정호scopus
Issue Date
2009
Journal Title
Proceedings - 2009 2nd International Conference in Visualisation, VIZ 2009
Indexed
SCOPUS scopus
Abstract
In this paper, we propose a wafer position error recognition system using computer vision technology and radial shape board. Wafer is one of the material when create the semiconductor. Wafer must be cleaned by the chemical during creating the semiconductor process .In this step, the robot moves wafer into the cleaning system. But sometime, the robot puts the wafer into an incorrect location. In this case, the trouble of cleaning system may be caused by the incorrect position, even the wafer can be broken. To prevent this case, we are going to find the wafer position in cleaning system using the computer vision technology. We perform the calibration and image processing for knowing the correct position of wafer. In calibration process, we are going to use the radial shape board. © 2009 IEEE.
DOI
10.1109/VIZ.2009.52
ISBN
9780769537344
Appears in Collections:
자연과학대학 > 수학전공 > Journal papers
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