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Optimization of uniaxial stress for high electron mobility on biaxially-strained n-MOSFETs

Title
Optimization of uniaxial stress for high electron mobility on biaxially-strained n-MOSFETs
Authors
Sun W.Shin H.
Ewha Authors
신형순
SCOPUS Author ID
신형순scopus
Issue Date
2014
Journal Title
Solid-State Electronics
ISSN
0038-1101JCR Link
Citation
vol. 94, pp. 23 - 27
Indexed
SCI; SCIE; SCOPUS WOS scopus
Abstract
Biaxial strain; Electron mobility; Strained Si; Stress; Uniaxial strain
DOI
10.1016/j.sse.2014.01.005
Appears in Collections:
엘텍공과대학 > 전자공학과 > Journal papers
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