Design, fabrication, and electrical characteristics of silicon stripixel sensors

Abstract

Silicon stripixel sensors utilizing a novel design of comb-type pixels intertwining with one other are capable of two-dimensional position detection of charged particles. We have designed and fabricated the stripixel sensors with 128 X and 128 Y strips in an active area of about 6 cm × 6 cm. Each strip in our design, in turn, consists of 128 comb-type basic units. X and Y basic units are intertwined in such a fashion that a pair of X and Y units forms a pixel in a stripixel sensor, and the pixel is sensitive to a charged particle passing through it. We present the design, device simulation, and fabrication of the silicon stripixel sensors. We also present the electrical characteristics of the sensors.