We report depth profiling of the critical current density and resistivity of YBa 2Cu 3O 7-x films grown by in-situ electron beam evaporation, The method is capable of providing important information on the uniformity of the films, and on the commonly observed property that the critical currents of coated conductor high temperature superconductor films do not scale linearly with thickness. Local critical current density shows a clear correlation with local resistivity. Homogeneous transport properties with a large critical current density (4 - 5 MA/cm 2 at 77 K, 0 T) are observed in the top faulted region, while it is found that the bottom part carries little supercurrent with a large local resistivity. Therefore, it is possible that thickness dependence of critical current density is a topological variation of good superconducting paths and/or grains in the thin-film bodies. The information derived may be useful in the characterization and optimization of superconducting thin films for electrical power and other applications.