Influence of trench-oxide depth on junction-size dependence of α-particle-induced charge collection

Abstract

The effect of trench-oxide depth on the α-particle-induced charge collection is analysed for various junction sizes. Simulation results indicate that the influence of trench-oxide depth on the charge collection substantially increases as the junction size is reduced. Confininement of the charge by the trench oxide in the reduced junction size is identified as a cause of this effect.