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Nanoscale observation of charge redistribution in Pb(Zr,Ti)O-3 thin films on Pt

Title
Nanoscale observation of charge redistribution in Pb(Zr,Ti)O-3 thin films on Pt
Authors
Oh, YJHur, JHJo, W
Ewha Authors
조윌렴
SCOPUS Author ID
조윌렴scopus
Issue Date
2005
Journal Title
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
ISSN
0374-4884JCR Link
Citation
vol. 47, pp. S522 - S525
Keywords
charge redistributionpolarizationelectrostatic force microscopyPZT
Publisher
KOREAN PHYSICAL SOC
Indexed
SCI; SCIE; SCOPUS; KCI WOS
Abstract
We report charge redistribution in polycrystalline Pb(Zr0.52Ti0.48)O-3 (PZT) thin films on Pt electrode. A sol-gel method is used to make ferroelectric PZT thin films. Highly (100) and (111) oriented PZT thin films are prepared on Pt/Ti-coated SiO2/Si (100). Drying conditions before crystallizing heat treatments have been explored over a wide range of temperature. Surface charge and polarization of the PZT films are observed by detecting an electrostatic force exerted on the biased conductive probe. Poling behavior is likely to have a relation with leakage current in the ferroelectric thin films. Trapping behavior of space charges is strongly dependent on the bottom electrode.
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자연과학대학 > 물리학전공 > Journal papers
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