Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김연상 | - |
dc.date.accessioned | 2017-01-18T02:01:34Z | - |
dc.date.available | 2017-01-18T02:01:34Z | - |
dc.date.issued | 2007 | - |
dc.identifier.issn | 0957-4484 | - |
dc.identifier.other | OAK-4308 | - |
dc.identifier.uri | https://dspace.ewha.ac.kr/handle/2015.oak/234011 | - |
dc.description.abstract | In this paper, we introduce an anti-adhesion poly(dimethylsiloxane) (PDMS)-coated flexible mold and its applications for room-temperature imprint lithography. The flexible mold is fabricated using an ultraviolet-curable prepolymer on a flexible substrate, and its surface is passivated with a thin layer of PDMS to impart an anti-adhesion property. The highly flexible mold enables conformal contact with a substrate on which a low-viscosity polymer resist is spin-cast in a thin layer. Large-area imprinting is then realized at room temperature under significantly reduced pressure. The mold was durable even after repetitive imprinting of over 200 times. Also, we show a double imprinting on the substrate with a PDMS-coated replica polymeric mold having 500 nm line patterns. This enables the formation of matrix patterns with varying feature heights in less than 7 min. © IOP Publishing Ltd. | - |
dc.language | English | - |
dc.title | A poly(dimethylsiloxane)-coated flexible mold for nanoimprint lithography | - |
dc.type | Article | - |
dc.relation.issue | 41 | - |
dc.relation.volume | 18 | - |
dc.relation.index | SCI | - |
dc.relation.index | SCIE | - |
dc.relation.index | SCOPUS | - |
dc.relation.journaltitle | Nanotechnology | - |
dc.identifier.doi | 10.1088/0957-4484/18/41/415303 | - |
dc.identifier.wosid | WOS:000249735600007 | - |
dc.identifier.scopusid | 2-s2.0-34748901159 | - |
dc.author.google | Lee N.Y. | - |
dc.author.google | Kim Y.S. | - |
dc.contributor.scopusid | 김연상(8938854200) | - |
dc.date.modifydate | 20211210152421 | - |