Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 조윌렴 | * |
dc.contributor.author | 김동욱 | * |
dc.date.accessioned | 2016-08-28T12:08:24Z | - |
dc.date.available | 2016-08-28T12:08:24Z | - |
dc.date.issued | 2010 | * |
dc.identifier.issn | 0304-3991 | * |
dc.identifier.other | OAK-6689 | * |
dc.identifier.uri | https://dspace.ewha.ac.kr/handle/2015.oak/220882 | - |
dc.description.abstract | We report fabrication of Ti metal nanodot arrays by scanning probe microscopic indentation. A thin poly-methylmethacrylate (PMMA) layer was spin-coated on Si substrates with thickness of 70nm. Nanometer-size pore arrays were formed by indenting the PMMA layer using a cantilever of a scanning probe microscope. Protuberances with irregular boundaries appeared during the indentation process. Control of approach and pulling-out speed during indentation was able to dispose of the protrusions. Ti metal films were deposited on the patterned PMMA layers by a radio-frequency sputtering method and subsequently lifted off to obtain metal nanodot arrays. The fabricated metal nanodot arrays have 200nm of diameter and 500nm of interdistance, which corresponds to a density of 4×10 8/cm 2. Scanning probe-based measurement of current-voltage (I-V) behaviors for a single Ti metal nanodot showed asymmetric characteristics. Applying external bias is likely to induce oxidation of Ti metal, since the conductance decreased and volume change of the dots was observed. I-V behaviors of Ti metal nanodots by conventional e-beam lithography were also characterized for comparison. © 2010 Elsevier B.V. | * |
dc.language | English | * |
dc.title | Scanning probe lithography for fabrication of Ti metal nanodot arrays | * |
dc.type | Article | * |
dc.relation.issue | 6 | * |
dc.relation.volume | 110 | * |
dc.relation.index | SCI | * |
dc.relation.index | SCIE | * |
dc.relation.index | SCOPUS | * |
dc.relation.startpage | 737 | * |
dc.relation.lastpage | 740 | * |
dc.relation.journaltitle | Ultramicroscopy | * |
dc.identifier.doi | 10.1016/j.ultramic.2010.02.042 | * |
dc.identifier.wosid | WOS:000279482900032 | * |
dc.identifier.scopusid | 2-s2.0-77953609718 | * |
dc.author.google | Jung B. | * |
dc.author.google | Jo W. | * |
dc.author.google | Gwon M.J. | * |
dc.author.google | Lee E. | * |
dc.author.google | Kim D.-W. | * |
dc.contributor.scopusid | 조윌렴(7103322276) | * |
dc.contributor.scopusid | 김동욱(57203350633) | * |
dc.date.modifydate | 20240123091004 | * |