Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 강원 | * |
dc.date.accessioned | 2016-08-28T12:08:37Z | - |
dc.date.available | 2016-08-28T12:08:37Z | - |
dc.date.issued | 2009 | * |
dc.identifier.issn | 1071-1023 | * |
dc.identifier.other | OAK-6136 | * |
dc.identifier.uri | https://dspace.ewha.ac.kr/handle/2015.oak/220411 | - |
dc.description.abstract | A simple way to avoid the oxidation layer on the surface of Permalloy by improving the fabrication process was investigated. Electron-beam lithography (EBL) was used to define patterns with a very high resolution positive tone resist, ZEP 520A-7 for high dry-etch resistance, on a prepatterned silicon substrate including contact pads. Reactive ion etching (RIE) was carried out at 50 mTorr vacuum with a 100 W rf power and 50 SCCM of CH4 gas flow rate for 100s. A Piranha etch is required to remove the residual resist because the degenerated resist is not easy to remove with a solvent after the RIE process. A 4:1 mixture of sulfuric acid (H2SO4) and hydrogen peroxide (H2O2) was prepared at 110 °C. With an optimal alignment on the predefined grooves, the gold electrodes could be selectively deposited by the liftoff process with a controlled height or width. The results show that embedded structure of the electrodes minimizes the perturbation to the magnetic metallic channel with a good electrical contact. | * |
dc.language | English | * |
dc.title | Fabrication of oxidation-free contacts to nanopatterned Permalloy structures | * |
dc.type | Conference Paper | * |
dc.relation.issue | 6 | * |
dc.relation.volume | 27 | * |
dc.relation.index | SCI | * |
dc.relation.index | SCIE | * |
dc.relation.index | SCOPUS | * |
dc.relation.startpage | 2487 | * |
dc.relation.lastpage | 2489 | * |
dc.relation.journaltitle | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | * |
dc.identifier.doi | 10.1116/1.3263264 | * |
dc.identifier.wosid | WOS:000272803400035 | * |
dc.identifier.scopusid | 2-s2.0-72849112161 | * |
dc.author.google | Kim H.-Y. | * |
dc.author.google | Lee K.H. | * |
dc.author.google | Kim G.-T. | * |
dc.author.google | Kang W. | * |
dc.author.google | Lee K.-J. | * |
dc.contributor.scopusid | 강원(7202402145) | * |
dc.date.modifydate | 20240116110212 | * |