NL repository
menu
검색
Library
Browse
Communities & Collections
By Date
Authors
Titles
Subject
My Repository
My Account
Receive email updates
Edit Profile
DSpace at EWHA
자연과학대학
물리학전공
Journal papers
View : 475 Download: 281
Spectroscopic ellipsometry and Raman study of fluorinated nanocrystalline carbon thin films
Title
Spectroscopic ellipsometry and Raman study of fluorinated nanocrystalline carbon thin films
Authors
Lee H.
;
Kim I.-Y.
;
Han S.-S.
;
Bae B.-S.
;
Choi M.K.
;
Yang I.-S.
Ewha Authors
양인상
SCOPUS Author ID
양인상
Issue Date
2001
Journal Title
Journal of Applied Physics
ISSN
0021-8979
Citation
Journal of Applied Physics vol. 90, no. 2, pp. 813 - 818
Indexed
SCI; SCIE; SCOPUS
Document Type
Article
Abstract
Using spectroscopic ellipsometry and Raman spectroscopy, we measured the pseudodielectric function and the phonon frequencies of fluorinated nanocrystalline carbon (nc-C:F) thin films grown on silicon substrate at varying growth temperature and gas flux ratio of CH 4 and CF 4. Utilizing the Tauc-Lorentzian formula, we performed multilayer analysis to estimate the dielectric function of the fluorinated nanocrystalline carbon thin films. We also adopted Gaussian-like density-of-states model proposed by Demichelis et al. [Phys. Rev. B 45, 14364 (1992)] and estimated the amplitude A, the transition energy E π, and the broadening σ π of π→π* transitions. Based on this model, we explained the change of the optical gap and the refractive index in terms of the change of the amplitude A rather than the shift of transition energy Eπ of π→π* transitions. Raman and ellipsometric study suggested that the average size of nanocrystallites in the fluorinated carbon thin films was smaller than that of amorphous hydrogenated carbon films studied by Hong et al. [Thin Solid Films 352, 41 (1999)]. © 2001 American Institute of Physics.
DOI
10.1063/1.1378337
Appears in Collections:
자연과학대학
>
물리학전공
>
Journal papers
Files in This Item:
Spectroscopic ellipsometry and Raman study of fluorinated nanocrystalline carbon thin films.pdf
(439.06 kB)
Download
Export
RIS (EndNote)
XLS (Excel)
XML
Show full item record
Find@EWHA
트윗하기
BROWSE
Communities & Collections
By Date
Authors
Titles
Subject