Broadband enhancement of infrared absorption in microbolometers using Ag nanocrystals

Abstract

High performance microbolometers are widely sought for thermal imaging applications. In order to increase the performance limits of microbolometers, the responsivity of the device to broadband infrared (IR) radiation needs to be improved. In this work, we report a simple, quick, and cost-effective approach to modestly enhance the broadband IR response of the device by evaporating Ag nanocrystals onto the light entrance surface of the device. When irradiated with IR light, strong fields are built up within the gaps between adjacent Ag nanocrystals. These fields resistively generate heat in the nanocrystals and underlying substrate, which is transduced into an electrical signal via a resistive sensing element in the device. Through this method, we are able to enhance the IR absorption over a broadband spectrum and improve the responsivity of the device by similar to 11%. (C) 2015 AIP Publishing LLC.