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Showing results 1 to 9 of 9

Issue Date	Title	Author(s)	Type
2008	A low-drift, open-loop controlled, single crystalline silicon micromirror with floating field-limiting shields	박재형	Article
2009	Design and fabrication of 2-DOF silicon micromirror with sloped electrodes	박재형	Conference Paper
2009	Design and fabrication of a self-aligned parallel-plate-type silicon micromirror minimizing the effect of misalignment	박재형	Article
2007	Drift-free single crystalline silicon micromirror with floating field limiting shields	박재형	Conference Paper
2009	Experimental and theoretical analysis of DEP-based particle deflection for the separation of protein-bound particles	박재형	Article
2009	High fill-factor micromirror array using a self-aligned vertical comb drive actuator with two rotational axes	박일흥; 박재형	Article
2009	MEMS micromirror characterization in space environments	박일흥; 박재형	Article
2007	Monolithic RF MEMS probe array system using RF MEMS SP3T switches for permittivity measurement	박재형	Conference Paper
2009	Reliability-based characterization of single crystalline silicon micromirrors for space applications	박일흥; 박재형	Conference Paper

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