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Showing results 1 to 7 of 7

Issue DateTitleAuthor(s)Type
2008A low-drift, open-loop controlled, single crystalline silicon micromirror with floating field-limiting shields박재형Article
2009Design and fabrication of 2-DOF silicon micromirror with sloped electrodes박재형Conference Paper
2009Design and fabrication of a self-aligned parallel-plate-type silicon micromirror minimizing the effect of misalignment박재형Article
2007Drift-free single crystalline silicon micromirror with floating field limiting shields박재형Conference Paper
2009High fill-factor micromirror array using a self-aligned vertical comb drive actuator with two rotational axes박일흥; 박재형Article
2009MEMS micromirror characterization in space environments박일흥; 박재형Article
2009Reliability-based characterization of single crystalline silicon micromirrors for space applications박일흥; 박재형Conference Paper
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