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Silicon optrode array with monolithically integrated SU-8 waveguide and single LED light source
- Title
- Silicon optrode array with monolithically integrated SU-8 waveguide and single LED light source
- Authors
- Ryu, Daeho; Lee, Youjin; Lee, Yongseung; Lee, Yena; Hwang, Seoyoung; Kim, Yong-Kweon; Jun, Sang Beom; Lee, Hyang Woon; Ji, Chang-Hyeon
- Ewha Authors
- 이향운; 전상범; 지창현
- SCOPUS Author ID
- 이향운; 전상범; 지창현
- Issue Date
- 2022
- Journal Title
- JOURNAL OF NEURAL ENGINEERING
- ISSN
- 1741-2560
1741-2552
- Citation
- JOURNAL OF NEURAL ENGINEERING vol. 19, no. 4
- Keywords
- optogenetics; MEMS; silicon optrode; LED; SU-8 waveguide; in-vivo
- Publisher
- IOP Publishing Ltd
- Indexed
- SCIE; SCOPUS
- Document Type
- Article
- Abstract
- Objective. This paper presents a conventional light emitting diode (LED) and polymer waveguide coupled silicon optrode array. Approach. Unique lens design at the waveguide inlet enables a high light coupling efficiency with a single LED light source, and provides small power consumption compatible with a wireless optogenetic neuromodulation system. To increase the light intensity at the waveguide tip, a lensed waveguide is fabricated with epoxy-based photoresist SU-8, which has a plano-convex lens shape at the waveguide inlet to focus the light in the horizontal direction. In addition, a cylindrical lens is assembled in front of the waveguide inlet to focus the source light in the vertical direction. Main results. The glass cylindrical lens and SU-8 plano-convex lens increased the light coupling efficiency by 6.7 dB and 6.6 dB, respectively. The fabricated 1 x 4 array of optrodes is assembled with a single LED with 465 nm wavelength, which produces a light intensity of approximately 2.7 mW mm(-2) at the SU-8 waveguide outlet when 50 mA input current is applied to the LED. Each optrode has four recording electrodes at the SU-8 waveguide outlet. The average impedance of the iridium oxide (IrO (x) ) electroplated recording electrodes is 43.6 k omega. Significance. In-vivo experiment at the hippocampus region CA1 and CA2 demonstrated the capability of optical stimulation and neural signal recording through the LED and SU-8 waveguide coupled silicon optrode array.
- DOI
- 10.1088/1741-2552/ac7f5f
- Appears in Collections:
- 의과대학 > 의학과 > Journal papers
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