Vacuum packaged electromagnetic 2D scanning micromirror

Abstract

We herein present the design, fabrication, and wafer-level packaging of an electromagnetic biaxial scanning micromirror. The vacuum packaging of the micromirror was implemented by anodically bonding the glass cap wafer to both sides of the silicon substrate with the micromirror. The measured quality factor of the vacuum packaged micromirror is 1923.2 for the horizontal scan, whereas that of the device in the air is 649.6. The maximum optical scan angle of the vacuum packaged micromirror is 24.19 degrees at 155 mApp and 11.9 kHz for the horizontal scan, and 7.1 degrees at 204.7 mApp and 60 Hz for the vertical scan. The estimated vacuum level of the package is 1.65 +/- 0.85 Torr. (C) 2019 Elsevier B.V. All rights reserved.