Nanoscale observation of charge redistribution in Pb(Zr,Ti)O 3 thin films on Pt

Abstract

We report charge redistribution in polycrystalline Pb(Zr 0.52Ti 0.48)O 3 (PZT) thin films on Pt electrode. A sol-gel method is used to make ferroelectric PZT thin films. Highly (100) and (111) oriented PZT thin films are prepared on Pt/Ti-coated SiO 2/Si (100). Drying conditions before crystallizing heat treatments have been explored over a wide range of temperature. Surface charge and polarization of the PZT films are observed by detecting an electrostatic force exerted on the biased conductive probe. Poling behavior is likely to have a relation with leakage current in the ferroelectric thin films. Trapping behavior of space charges is strongly dependent on the bottom electrode.