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자연과학대학
물리학전공
Journal papers
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Tracking control of electrostatically actuated micromirror with closed-loop feedback circuit
Title
Tracking control of electrostatically actuated micromirror with closed-loop feedback circuit
Authors
Park J.H.
;
Chung T.
;
Jeon J.A.
;
Kim J.E.
;
Kim M.
;
Kim Y.K.
;
Na G.
;
Park I.H.
;
Yoo B.W.
Ewha Authors
박일흥
;
박재형
SCOPUS Author ID
박일흥
Issue Date
2008
Journal Title
Electronics Letters
ISSN
0013-5194
Citation
Electronics Letters vol. 44, no. 22, pp. 1295 - 1297
Indexed
SCI; SCIE; SCOPUS
Document Type
Article
Abstract
Presented is a closed-loop feedback control of an electrostatically actuated micromirror to track a moving light source and to stabilise fast the tilting angle. The micromirror has been designed and fabricated with single crystalline silicon. Tracking and tilt-angle stabilisation has been tested using a position-sensing detector and analogue feedback control circuit. Successful tracking of a moving light source was achieved. The feedback control has been also verified to improve the tilt-angle stabilisation time of the micromirror significantly. © 2008 The Institution of Engineering and Technology.
DOI
10.1049/el:20082051
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