View : 20 Download: 0

Tracking control of electrostatically actuated micromirror with closed-loop feedback circuit

Title
Tracking control of electrostatically actuated micromirror with closed-loop feedback circuit
Authors
Park J.H.Chung T.Jeon J.A.Kim J.E.Kim M.Kim Y.K.Na G.Park I.H.Yoo B.W.
Ewha Authors
박일흥박재형
Issue Date
2008
Journal Title
Electronics Letters
ISSN
0013-5194JCR Link
Citation
vol. 44, no. 22, pp. 1295 - 1297
Indexed
SCI; SCIE; SCOPUS WOS scopus
Abstract
Presented is a closed-loop feedback control of an electrostatically actuated micromirror to track a moving light source and to stabilise fast the tilting angle. The micromirror has been designed and fabricated with single crystalline silicon. Tracking and tilt-angle stabilisation has been tested using a position-sensing detector and analogue feedback control circuit. Successful tracking of a moving light source was achieved. The feedback control has been also verified to improve the tilt-angle stabilisation time of the micromirror significantly. © 2008 The Institution of Engineering and Technology.
DOI
10.1049/el:20082051
Appears in Collections:
자연과학대학 > 물리학전공 > Journal papers
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE