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Improvement of sense mode bandwidth of vibratory silicon-on-glass gyroscope using dual-mass system

Title
Improvement of sense mode bandwidth of vibratory silicon-on-glass gyroscope using dual-mass system
Authors
Hwang Y.S.Kim Y.-K.Ji C.-H.
Ewha Authors
지창현
SCOPUS Author ID
지창현scopus
Issue Date
2011
Journal Title
Transactions of the Korean Institute of Electrical Engineers
ISSN
1975-8359JCR Link
Citation
vol. 60, no. 9, pp. 1733 - 1740
Indexed
SCOPUS; KCI scopus
Abstract
In this research, a MEMS vibratory gyroscope with dual-mass system in the sensing mode has been proposed to increase the stability of the device using wide bandwidth. A wide flat region between the two resonance peaks of the dual-mass system removes the need for a frequency matching typically required for single mass vibratory gyroscopes. Bandwidth, mass ratio, spring constant, and frequency response of the dual-mass system have been analyzed with MATLAB and ANSYS simulation. Designed first and second peaks of sensing mode are 5,917 and 8,210Hz, respectively. Driving mode resonance frequency of 7,180Hz was located in the flat region between the two resonance peaks of the sensing mode. The device is fabricated with anodically bonded silicon-on-glass substrate. The chip size is 6mm × 6mm and the thickness of the silicon device layer is 50um. Despite the driving mode resonance frequency decrease of 2.8kHz and frequency shift of 176Hz from the sensing mode due to fabrication imperfections, measured driving frequency was located within the bandwidth of sensing part, which validates the utilized dual-mass concept. Measured bandwidth was 768Hz. Sensitivity calculated with measured displacement of driving and sensing parts was 22.4aF/deg/sec. Measured slope of the sensing point was 0.008dB/Hz.
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엘텍공과대학 > 전자공학과 > Journal papers
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