View : 29 Download: 0

Biaxial vector-graphic scanning micromirror using radial magnetic field

Title
Biaxial vector-graphic scanning micromirror using radial magnetic field
Authors
Han A.Cho A.R.Ju S.Yoon B.Lee S.Kim T.Bu J.-U.Ji C.-H.
Ewha Authors
지창현
SCOPUS Author ID
지창현scopus
Issue Date
2015
Journal Title
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Keywords
Electromagnetic actuationLaser scanningRadial magnetic fieldVector-graphic scanning micromirror
Publisher
Institute of Electrical and Electronics Engineers Inc.
Indexed
SCOPUS scopus
Abstract
This paper presents the design, fabrication, and measurement results of an electromagnetic biaxial vector-graphic scanning micromirror. Instead of utilizing locally distributed magnetic fields from multiple magnets, radial magnetic field from concentric magnet assembly and unique coil geometry have been used to realize independent scan along two perpendicular axes irrespective of operation frequency. Proposed actuation mechanism also enables the use of a compact non-hermetic polymer-based package due to large driving torque and simple structure without any gap-closing microstructures. The magnet assembly is placed under the micromirror die with passive alignment and gap control during assembly process. Mechanical half scan angle of 11.6° and 3.8° have been achieved at DC current of 250mA and 400mA for horizontal and vertical scans, respectively. © 2015 IEEE.
DOI
10.1109/TRANSDUCERS.2015.7181055
ISBN
9781479989553
Appears in Collections:
엘텍공과대학 > 전자공학과 > Journal papers
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE