View : 18 Download: 0

2-D forward optical scanner with glass microlens and isolation blocks using thermal reflow

Title
2-D forward optical scanner with glass microlens and isolation blocks using thermal reflow
Authors
Yoo S.Jin J.-Y.Ha J.-G.Ji C.-H.Kim Y.-K.
Ewha Authors
지창현
SCOPUS Author ID
지창현scopus
Issue Date
2012
Journal Title
International Conference on Optical MEMS and Nanophotonics
ISSN
2160-5033JCR Link
Citation
pp. 154 - 155
Indexed
SCOPUS scopus
Abstract
We present a novel fabrication method of a two-dimensional forward optical scanner with integrated microlens. Glass microlens and electrical isolation blocks were integrated with silicon XY-stage using thermal reflow process. Measured scan angles in X and Y directions at resonance were ±4.9°and ±5.0°, respectively, at atmospheric pressure. © 2012 IEEE.
DOI
10.1109/OMEMS.2012.6318849
ISBN
9781457715112
Appears in Collections:
엘텍공과대학 > 전자공학과 > Journal papers
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE