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Monolithically integrated glass microlens scanner using a thermal reflow process

Title
Monolithically integrated glass microlens scanner using a thermal reflow process
Authors
Yoo S.Ha J.-G.Jin J.-Y.Ji C.-H.Kim Y.-K.
Ewha Authors
지창현
SCOPUS Author ID
지창현scopus
Issue Date
2013
Journal Title
Journal of Micromechanics and Microengineering
ISSN
0960-1317JCR Link
Citation
vol. 23, no. 6
Indexed
SCI; SCIE; SCOPUS WOS scopus
Abstract
A monolithically integrated glass microlens optical scanner is presented. A new wafer-level fabrication approach addresses the issue of microlens integration and alignment in conventional microlens integrated devices. A through-silicon plano-convex glass microlens has been fabricated on a silicon substrate prior to the formation of an integrated microlens actuator, realized through two thermal reflow processes at 850 °C. A lateral comb drive is adapted to demonstrate the glass microlens scanner. The 800 m diameter microlens was laterally shifted up to ±51.6 m when an ac voltage of 28.5 V in amplitude was applied at a resonant frequency of 1.749 kHz at atmospheric pressure. The optical scanning angle of ±2.0° has been obtained with the fabricated device. © 2013 IOP Publishing Ltd.
DOI
10.1088/0960-1317/23/6/065012
Appears in Collections:
엘텍공과대학 > 전자공학과 > Journal papers
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