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Fabrication of replica polymer mold for imprint lithography

Title
Fabrication of replica polymer mold for imprint lithography
Authors
Lee, Min JungKim, Youn Sang
Ewha Authors
김연상
Issue Date
2007
Journal Title
ELECTRONIC MATERIALS LETTERS
ISSN
1738-8090JCR Link
Citation
vol. 3, no. 3, pp. 155 - 162
Keywords
imprint lithographyreplica moldpolymer moldsurface treatmentanti-adhesive coating
Publisher
KOREAN INST METALS MATERIALS
Indexed
SCIE; SCOPUS; KCI WOS
Abstract
We introduce a universal strategy virtually applicable to any types of stamping molds to achieve anti-adhesion surface for simple and rapid fabrication and replication of nanostructures with high fidelity. The surface of various hard and soft molds irrespective of basic mold materials have been bound strongly and covalently with poly(dimethylsiloxane) (PDMS), which has a good and optimum surface property for molding process such as low surface energy and low adhesion property like normal PDMS mold. In particular, nano-featured replica molds were fabricated from SiO2 nanostructures with general UV-curing polymers. With this method, we replicated complex nanostructures with high aspect ratios on various substrates over several square inches.
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자연과학대학 > 화학·나노과학전공 > Journal papers
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